西門子549-215

549-215 在功能表圖中，生成活動步的進展是按有向連線指定的路線進行的，進展由一個或幾個轉(zhuǎn)換的實現(xiàn)來完成。轉(zhuǎn)換的符號是一根短畫線，與有向連線相交，轉(zhuǎn)換將相鄰的兩個步隔開。如果通過有向連線連接到轉(zhuǎn)換符號的所有前級步都是活動步，該轉(zhuǎn)換為“使能轉(zhuǎn)換”，否則該轉(zhuǎn)換為“非使能轉(zhuǎn)換”。只有當轉(zhuǎn)換為使能轉(zhuǎn)換且轉(zhuǎn)換條件滿足時，該轉(zhuǎn)換才被實現(xiàn)。某轉(zhuǎn)換實現(xiàn)，所有與有向連線和相應(yīng)轉(zhuǎn)換符號相連的后續(xù)步被激活，而所有與有向連線和相應(yīng)轉(zhuǎn)換符號相連的前級步均為非活動步。

549-215 

AE Pinnacle 6kW 10kW DC Supply 3152412-116 0190-07172

MRC Eclipse Star RF High Voltage Source A118144

OneAC SVG 90 Power Conditioner CLD31750SPL

Brooks PRI Wafer Robot WTM511-2-FWS02-V1

Brooks PRI Automation Robot WTM-511-2-FWS02

AE Pinnacle 6kW 3152412-219C

AE HFV 8000 8kW RF Generator 3155083-192 

Hitachi I900SRT Wafer Inspection Transfer Robot

AE Navigator RF Match 3155132-001D 

AE Apex 3000/13 RF Generator 3kW 

Brooks Genus Right Vacuum Load Lock 001-9300-54

TEL ACT 12 Temp Control REX-B870-CS1B CT2986-430279-W1

Nikon NSR S202 

Equipe PRI Robot Controller ABM-405-1-S-CE-S293

Newport Kensington Robot 15-3701-1425-25

AE HFV 8000 RF Generator 3155083-109B 

AE HFV 8000 RF Generator 3155083-109A 

AE HFV 8000 8kW RF Generator 3155083-180A 

PRI Automation Robot ABM-405-1-S-CE-S293 

AE RFPP RF25M 2500W RF Generator 3150048-000

LAM Research Electrical Control Panel 685-017705-027

Comdel CLX-2500  0190-02702

AE Remote Plasma Gen. 3151801-004A 

Comdel CLX-2500 350kHz-LF 

Comdel CLX-2500 LF RF Gen 2500W FP1335R4 0190-01370

Comdel CLX-2500 350KHz-LF FP1336R3

Shimadzu Turbo Molecular Pump TMP 3403LMC

Coherent IndyStar 193 Laser Discharge Unit 0190-B0160

Osaka Vacuum Turbopump TH542 untested 3620-01353

ENI OEM-12B3 RF Generator 1250W 0190-76028

ENI OEM-12B RF Generator 1250W 0190-76048

Edwards iL70 Vacuum Pump LCDP 70 QMB250

AE RFPP LF-10WC RF Generator 3150076-002F

LAM Research Electrical Control Panel 685-017705-002

ENI OEM-12B RF Generator OEM-12B-07 

ENI OEM-10B RF Generator OEM-10B-8

ENI OEM-12B3  0190-76028

ENI Spectrum RF Generator B-5002 5kW 0190-15320 

ENI OEM-12B RF Generator  0190-70080

KLA-Tencor AIT2 CPM Power Assembly 0218541-000

MKS ENI Spectrum B-5002-02 5kW RF Generator 0190-15320