ASML 4022.422.4644工作單元

ASML 4022.422.4644工作單元該單元采用先進(jìn)的運(yùn)動(dòng)控制技術(shù)，確保在納米級(jí)制造工藝中實(shí)現(xiàn)的重復(fù)精度和穩(wěn)定性。其設(shè)計(jì)符合半導(dǎo)體行業(yè)嚴(yán)苛的潔凈室環(huán)境標(biāo)準(zhǔn)，適用于DUV（深紫外）及部分EUV（極紫外）光刻機(jī)系統(tǒng)。

ASML 4022.422.4644工作單元

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