6SE6430-2AD31-8DA0

Mitsubishi Sinchoon Turbopump FT-2300M-W1K1

AE Ovation  3150861-002D 0190-27049

AE Navigator 3155169-009C 0190-23122

EDWARDS Dry Vacuum Pump iQDP80 QMB500

AE Navigator RF Match 3155169-001 0190-16177

ENI Spectrum RF Generator B-5002  0190-15320

Osaka Vacuum Turbopump Set TH532ASAW 

TEL ACT 12 DC Power Supply TDK MSE181E

AE E'Wave Bipolar DC Power Supply 3152603-014D

ENI OEM-2000 

MKS ENI SPECTRUM 5kW RF Generator B-5002-01

AE Pinnacle 20KW DC Power Supply 3152412-129B

AE E'Wave DC Power Supply 3152603-014D 0190-23269

AE Pinnacle 20kW DC Supply 3152412-149A 0190-08124

AE Pinnacle 10kW 6kW DC Supply 3152412-214 0190-14126

Yaskawa Dual Arm Trnsfr Robot XU-RCM7220  0190-25393

ENI OEM-2000 Rev.B RF Generator 2000W 

KLA-Tencor AIT 2 Optics Module 0099610-000

TDK TEL ACT 12 DC Backup Module MSE181D

ENI Spectrum RF Generator B-5002  0190-15320

AE RFPP RF25M RF Generator 3150048-000 

AE RF25M 2500W RF Generator 3150048-004B 

ENI Spectrum B-5002 RF Generator 0190-15320

ENI OEM-12B3 3 Phase RF Generator  0190-76006

Hitachi DC Power Generator 3-821755-2

TEL ACT 8 Adhesion Process Station 811

Advanced Energy Ovation 2760 RF Generator 3150292-007

AE Apex 5513 

AE Apex 5513  0190-11209

Edwards iQDP80  QMB250 

Asyst SMIF-300FL 

Edwards iQDP40 Dry Vacuum Pump QMB250

AE RF Match Network 3155031-021A 

MECS Wafer Handling Robot UTM-3500 

Seiko Seiki Turbomolecular STP SCU-H1000C

AE PDX 900-2V RF Generator 3156024-110A

AE PDX 900-2V 3156024-110C 

Despatch Tool Conditioning Oven SNB2-24-S

AE VHF 2060 RF Generator 3150852-005A

Asyst Transfer Robot UTX-F5500-16

AE Apex 3513 0920-00005

AE HFV 8000 5kW RF Generator 3155083-109B

Ebara A10S 

AE HFV 8000 RF Generator 3155083-111A

TEL P-8 Wafer Prober 200mm Dual Arm Robot & Controller

Kawasaki Robot Slave Controller 30C61C-B002 0190-12377

Kawasaki Master Robot Controller 30C61D-B001 0190-12378

Yaskawa Robot Controller XU-CN1112A working 0190-10288

Yaskawa Prealigner 300 mm XU-ACP4801 0190-05652

ENI DCG-200 DCG-200E 

Brooks PRI Wafer Robot WTM-511-2-FWS02-V1

AE Pinnacle 6kW DC Power Supply 3152412-218E 

Brooks PRI Robot WTM-511-2-FWS02-V1-CU 

Brooks Fixload Load Port Fixload 25

ENI Genesis GMW-50 3kW RF Generator 0190-13202

ENI Genesis GHW-12Z RF Generator 0190-25527

TEL ACT 8 SOG Absolute Filter CT2980-090863-11 

TEL ACT 8 FFU Fan Filter Unit CT2980-091974-11

TEL ACT 8 FFU Fan Filter Unit CT2980-090796-11

AE Pinnacle 6kW DC Power Supply 3152412-218G 

SMC Heat Exchanger INR-498-P002 

AE Apex 5513 0190-11209

AE Apex 3013 RF Generator 3kW 0920-00049

TEL ACT 12 IRA Driver Assy CT2987-416031-W4

TEL ACT 8 IRA Driver Assy CT2987-406077-15 

AE Apex 3013 RF Generator 3kW 0190-11208

AE Apex 3013 RF Generator 3kW 0190-09837

AE Apex 3013 RF Generator 3kW 0190-11208

AE Apex 3513 3.5kW RF Generator 0920-00051

AE HFV 8000 8kW RF Generator 3155083-192 0190-15553

AE Pinnacle 6kW 10kW DC Supply 3152412-116 0190-13866

AE Ovation VHF 2760 RF Generator 3150292-005 0190-14887

AE Apex 3013 RF Generator 3kW working 0190-09837

SMC HE Control Unit Assy INR-498-P004 0190-18420

AE Pinnacle 6kW 10kW DC Supply 3152412-116 0190-07172

MRC Eclipse Star RF High Voltage Source A118144

OneAC SVG 90 Power Conditioner CLD31750SPL

Brooks PRI Wafer Robot WTM511-2-FWS02-V1

Brooks PRI Automation Robot WTM-511-2-FWS02

AE Pinnacle 6kW 3152412-219C

AE HFV 8000 8kW RF Generator 3155083-192 

Hitachi I900SRT Wafer Inspection Transfer Robot

AE Navigator RF Match 3155132-001D 

AE Apex 3000/13 RF Generator 3kW 

Brooks Genus Right Vacuum Load Lock 001-9300-54

TEL ACT 12 Temp Control REX-B870-CS1B CT2986-430279-W1

Nikon NSR S202 

Equipe PRI Robot Controller ABM-405-1-S-CE-S293

Newport Kensington Robot 15-3701-1425-25

AE HFV 8000 RF Generator 3155083-109B 

AE HFV 8000 RF Generator 3155083-109A 

AE HFV 8000 8kW RF Generator 3155083-180A 

PRI Automation Robot ABM-405-1-S-CE-S293 

AE RFPP RF25M 2500W RF Generator 3150048-000

LAM Research Electrical Control Panel 685-017705-027

Comdel CLX-2500  0190-02702

AE Remote Plasma Gen. 3151801-004A 

Comdel CLX-2500 350kHz-LF 

Comdel CLX-2500 LF RF Gen 2500W FP1335R4 0190-01370

Comdel CLX-2500 350KHz-LF FP1336R3

Shimadzu Turbo Molecular Pump TMP 3403LMC

Coherent IndyStar 193 Laser Discharge Unit 0190-B0160

Osaka Vacuum Turbopump TH542 untested 3620-01353

ENI OEM-12B3 RF Generator 1250W 0190-76028

ENI OEM-12B RF Generator 1250W 0190-76048

Edwards iL70 Vacuum Pump LCDP 70 QMB250

AE RFPP LF-10WC RF Generator 3150076-002F

LAM Research Electrical Control Panel 685-017705-002

ENI OEM-12B RF Generator OEM-12B-07 

ENI OEM-10B RF Generator OEM-10B-8

ENI OEM-12B3  0190-76028

ENI Spectrum RF Generator B-5002 5kW 0190-15320 

ENI OEM-12B RF Generator  0190-70080

KLA-Tencor AIT2 CPM Power Assembly 0218541-000

MKS ENI Spectrum B-5002-02 5kW RF Generator 0190-15320

6SE6430-2AD31-8DA0