6SE6420-2UD21-5AA1

CYMER ELS-6300 

Shimadzu Vacuum Turbopump TMP-H3603LMC-A1,EI-D3603M

LEYBOLD TURBO PUMP MAG1500

Spectron SL Series SL1302Q 

Zeiss Axiotron Inspection Microscope W/SONY CCD CAMERA

Zygo 7702 Laser Head 6mm pat:8070-0102-05

Zeiss Axiotron Inspection Microscope

MKS ASTeX ASTRONi Remote Plasma Source AX7670

AE advanced-energy XSTREAM RPS 

NIKON ECLIPSE L150 

YASKAWA WAFER TRANSFER ROBOT XU-RVM4120

VAT Pendulum Valve 65050-PA52-0002

DELTA TAU DATA SYS TURBO PMAC2

Leitz Ergolux AMC Inspection Microscope

LEYBOLD VACUUM TURBO PUMP MAG400

ASTeX MKS AX8400 AX8406 

ASYST WAFER TRANSPORT ROBOT UTW-F6000 

VARIAN ion implant sys. PULSE POWER SUPPLY

Dressler LFGS 1250D

Brooks Automation Techware 5 Express Controller T5X-S2

GENMARK L86R/R VER.21 

SONY PRECISE EYE AF VISION MICROSCOPE 3CCD 

Tachibana tectron TVC-04KET

National Instruments NI PXI-1000B 

AE Advanced Energy RF Match Network 3155169-005

AE Advanced Energy RF Match Network 3155126-018 

GENMARK GENCOBOT 4/3L 

SIEMENS 6ES5 955-3LC42 

Adtec AX-1000II 

TOSHIBA X-RAY Image Intensifiers E5844H-P1K

Mitsubishi Q173CPUN 

POWER PLAMA NPG 10KA MFGenerator RFGenerator

Semiconductor & PCB Equipment STEREOZOOM MICROSCOPE

Adtec AX-600III 

Varian V700 

GENMARK GENCOBOT ROBOT PREALIGNER

LEYBOLD INFICON TRANSPECTOR TSP TH100

ORMON VISION MATE F210-C10

MECS UTW-1310HG CS-1000

GENMARK S08R VER.21 WAFER TRANSFER ROBOT CONTROLLER

Mitsubishi HMI A985GOT-TBA 

OMRON Smart Sensor ZS-LDC11 + ZS-LD200

Zygo interferometer 6191-0584-01

Leybold NT 340

BOC Edwards Seiko Seiki Turbopump Controller SCU-H301C

OMRON SYSMAC CVM1-CPU21-V2 

DELTA TAU PMAC VME 602199-104

DELTA TAU PMAC VME 602199-503

KEYENCE VG-301+036T/R 

MKS 600 PRESSURE CONROLLER TYPE 651CDSIN

PRO-FACE GLC2600-TC41-24V 

ORMON F210-C10 

Keithley 7002 Switch System 

NSK Megatorque EE1410A03-25

Cognex 82403/pci 

LEICA MS5

AE Sekidenko 1000T

MEIDEN IV18A AXP VME165

TEL Tokyo Sanritz automation SVA011 VME BOARD SC7004

Varian V60 969-9351

AE PE-1000 RF Generator 3157501-009D 

Rotec VISIONCOMPACT Typ VC1-13140 002 

LEICA Leitz PL APO 250X/0.95

SBS Technologies CP782210NQ3C 

Olympus LM Plan FI 100x/0.80 BD 

NSK Megatorque Motor EM1410AF4-05 

TELI CS5260 

ZEISS epiplan-Apochromat 

Mitsubishi HMI A970GOT-TBA-B 

MITSUBISHI MELSEC A616DAV 

Mitsubishi Melsec plc AJ71QE71

TELI CS4200 

COGNEX MVS 8100 VPM-8100S-000 

6SE6420-2UD21-5AA1