IC693ALG223RR

智盛達西門子PLC控制器維修設(shè)備拆裝順序及方法

(1) 停機檢修，兩個人以上監(jiān)護操作；

(2) 把CPU前面板上的方式選擇開關(guān)從“運行”轉(zhuǎn)到“?！蔽恢?；

(3) 關(guān)閉PLC的主電源，然后關(guān)閉makaka的其他電源；

(4) 記下與電源架連接的電源線的線號和連接位置，然后拆下連接電源架和機柜的螺釘，即可拆下電源架；

(5) CPU主板及I/0板可在旋轉(zhuǎn)模板下方的螺絲后拆下；

(6) 安裝時以相反順序進行。

IC693ALG223RR 

Novellus Concept Two 8" 2 CVD-W 

CHA SE-1000-RAP 

Leybold MAG 3200 Turbo Pump DN 320 ISO-F

Veeco Dektak V200-Si, V 200/300

Hiden HPR30 Process Gas Analyzer HPR 30 RGA

Edwards iL600N 

Oerlikon Leybold RPK-60000 

Oerlikon Leybold MAG W 1300 C Turbo Pump 400110V0023

Leybold MAG W 1300 Turbo Pump

Brooks Automation MagnaTran 8 Robot

FSM 128 Intelligent Film Stress Measurement System

Edwards IPX 500

Kensington Wafer Robot 25-3700-1725-05 & 4000C control

Rebuilt Adixen/Alcatel ADP 122L Dry Pump ADP122L

Oerlikon Leybold TMP 1100C 

MKS ENI GHW-55A

Advanced Energy Ovation 35162 

AMAT 0040-07498 

VAT 0260X-ZE44 

YES CV100P Plasma Stripper: Yield Engineering Systems

Brooks FX-3000 

Seiko Seiki STP-H451C

Oerlikon Leybold TW 701 

Spectra Optivision II

Advanced Energy MDX-II 

Edwards Vacuum EPX 180L Dry Pump 400V

Brooks 003-9010-03

Advanced Energy MDX-II 30K 

Kensington 25-3780-6050-00 FI Track

Edwards iQDP80 

Kensington 25-3700-1425-05 

Leybold TW 700 

EBARA ET-2500WS 

Varian TV 551

MKS ENI Spectrum B-5002 

Stokes 212H-11 

Edwards iQDP40 

Edwards Zenith OM Exhaust Management System

Oerlikon Leybold WS-1001 

Adixen/Alcatel Vacuum ATH 

Veeco FPP-5000 

Edwards EXT 250M 

Micromanipulator 6100 

UHV FTIR Stainless Steel Vacuum System

Advanced Thermal Sciences ATS 1231-CCN 

Yaskawa XU-ACT152L-C10 Track

Schreiber TrueTon 750AC 

LDJ 4600 LM Kerr Magneto-Optic Measurement System MOKE

Telemark 4 Pocket Electron E-Beam Gun Source

MKS ENI GMW-50A RF Power Supply, 2MHz AMAT: 0190-13202

Edwards QDP40 Dry Vacuum Pump Rebuilt

Oerlikon Leybold WSU-501 

Alcatel/Adixen ATP 400 

Applied Materials PVD Magnet, AMAT # 0010-12582

Edwards EH-1200 

VAT 02008-AE44 

Smart Machines/Brooks Smartbot & Controller

Brooks Automation Reliance Wafer Robot, P/N 017-0950-01

Advanced Energy Pinnacle DC Magnetron Power Supply AE

Oerlikon Leybold Cone.Trol 200

Technics Micro Stripper Series 220-II

Pfeiffer TMU 261 P 

HiTek Power OL20KE/104/07 Stack

RFPP Advanced Energy RF20S 

MKS ENI DPGD-10 Power Supply, AMAT: 0190-36275

Varian HS-16 Diffusion Pump

ASTeX AX8200-AX8200D Ozone Generator: AX 8200 D

Kensington 25-3700-1425-05 Wafer Robot

Oerlikon Leybold D65BCS 

Affinity WWA-08CK-MP12CBD4 

Edwards GVSP30 

CTI Cryogenics 8500 

VAT 0200X-BE24 

Advanced Energy RFG 3000

CM 1720 Sealed Gas Rapid Temp Box Furnace 208/240V

Single Pocket Water Cooled Crucible

Lydall Affinity CWA-200L 

Agilent Versatest V1316 Memory

Oerlikon Leybold MAG 400CT 

Used Airco Temescal e-beam gun Power Supply CV-8

Brooks Automation 001-4130-03

Advanced Energy RFX 5500 

TorrVac SVL-202AC 

ASYST IsoPort Wafer Load Port ISO 9700-9129-01

Stokes 607 Vacuum Blower

VAT 64250-UE52 Vacuum Gate Valve: Rebuilt-Helium Tested

AD-TEC AX-2000EUII RF Generator,

VAT 65148-PACW 

Asyst Versaport 9700-5384-11

CTI Cryogenics Cryo-Torr 8 

Brooks Automation MagnaTran Series 8 Robot Controller

Varian V250 Turbo-V 250

Brooks Automation MagnaTran Series 8

B/E Aerospace Temperature Control Unit

Oerlikon Leybold WS-251

Alcatel/Adixen ATP 150

Advanced Energy Pinnacle DC Magnetron Power Supply AE

Leybold TW 300

Genmark Automation Gencobot 7S 

VAT 02110-AE24-AAS1 

SMC XGT312-47336-2C1-X2

VAT 02110-AE24 

Stokes 306 Vacuum Blower Rebuilt,

Leybold TI 40 B Vacuum Vane Pump: Surplus 

Welch 1398 Duo-Seal Rotary Vane Vacuum Pump: Rebuilt

VAT 64248-UE52 12" CF Vacuum Gate Valve: Surplus New

Brooks FIXLOAD 25 Wafer Load Port: 013077-120-20

Pfeiffer TPH 330 Turbo Vacuum Pump

Nuvac Galiso MRP-201 

Temescal Edwards SFIH-270-3 

Bay Voltex HRE-HT-30650 

ASYST 9700-5384-02R VersaPort 2200 

Brooks Polycold Aquatrap/Cryotiger T1102-15-000-30

Cryomech CP25 Helium Cryo Compressor: CP 25 Tested Good

Advanced Energy PDX-2500 RF Power Supply 3156012-103

HiTek Power OL8000/A104/126 HV Stack

Advanced Energy 3151801-001 

Leybold TI 25 B Vacuum Vane Pump: Surplus

VAT 14048-PE24 Vacuum ISO-250

VAT 64048-UE52