IC693BEM321

IC693BEM321

本步驟的試驗(yàn)?zāi)康氖菍⒔?jīng)過實(shí)驗(yàn)室調(diào)試的PLC機(jī)及邏輯程序，放到實(shí)際工藝流程中，通過現(xiàn)場(chǎng)工藝設(shè)備的輸入、輸出節(jié)點(diǎn)及連接線路進(jìn)行系統(tǒng)運(yùn)行的邏輯驗(yàn)證。

試驗(yàn)時(shí)，將PLC控制的工藝設(shè)備(主要指電力拖動(dòng)設(shè)備)主回路斷開二相(僅保留作為繼電控制電源的一相)，使其在送電時(shí)不會(huì)轉(zhuǎn)動(dòng)。按設(shè)計(jì)要求對(duì)子系統(tǒng)的不同運(yùn)轉(zhuǎn)方式及其他控制功能，逐項(xiàng)進(jìn)行系統(tǒng)模擬實(shí)驗(yàn)，先確認(rèn)各轉(zhuǎn)換開關(guān)、工作方式選擇開關(guān)，其他預(yù)置開關(guān)的正確位置，然后通過PLC起動(dòng)系統(tǒng)，按聯(lián)鎖順序觀察并記錄PLC各輸出節(jié)點(diǎn)所對(duì)應(yīng)的繼電器、接觸器的吸合與斷開情況，以及其順序、時(shí)間間隔、信號(hào)指示等是否與設(shè)計(jì)的工藝流程邏輯控制要求相符，觀察并記錄其他裝置的工作情況。對(duì)模擬聯(lián)動(dòng)空投實(shí)驗(yàn)中不能動(dòng)作的執(zhí)行機(jī)構(gòu)，料位開關(guān)、限位開關(guān)、儀表的開關(guān)量與模擬量輸入、輸出節(jié)點(diǎn)，與其他子系統(tǒng)的聯(lián)鎖等，視具體情況采用手動(dòng)輔助、外部輸入、機(jī)內(nèi)強(qiáng)置等手段加以模擬，以協(xié)助PLC指揮整個(gè)系統(tǒng)按設(shè)計(jì)的邏輯控制要求運(yùn)行。

AMAT XY Stage System, G3/LP with Controller 0190-a1411

VARIAN E11284500 UPGRADE KIT BEAMLINE W/ LEYBOLD PUMP

NOVA NOVASCAN 3000 CONTROL UNIT 315-4000-00 0500-00217

AMAT CONTROL UNIT HARDWARE 0500-00217

APPLIED MATERIALS (AMAT) PRE-ACCEL ASSY P/N 9090-00574

EDWARDS IBC DISPENSE MODULE P/N F33945100 REV 11

AMAT BOX, IBC DISPENSE BOX, ECP - SF3 0190-01599

DNS ROBOT, SK2000 2-39-82334 TS311-2008S

VARIAN VACUUM TURBO PUMP PFEIFFER TPH1001P E11080562

AMAT MEC ASSY DR300 f/Intel & R.O.W 0650-a0170

NOVA NOVASCAN 420 CONTROL UNIT -

TEL (TOKYO ELECTRON) MB3M80-000978015 TRAP

APPLIED MATERIALS (AMAT) CHASSIS IHC DC DAQ QUANTUM 3

OERLIKON LEYBOLD PUMP, TURBO MAG W 1300 C 400110V0011

NOVELLUS SYSTEMS INC BELL JAR, SPEED 02-10387-01

AXCELIS 3-AXIS ROBOT 322703R 547932 REV D

LEYBOLD TURBO PUMP, TMP 1000C

AMAT IP 366MHz with S/W 4.2.400.2 for Intel 0090-a2280

STEAG ROBOT, Y-AXIS LEFT 00048929-00

STEAG ROBOT, Y-AXIS RIGHT 00048929-00

NSD SK2-- LSHAPED KAWASAKI 060053R0S1 2-39-68521

NOVELLUS BELL JAR NE HIGHPOWER 02-293756-00

COMDEL CLX-10K/CX-16P mstr-slave NOVELLUS 27-257659-00

APPLIED MATERIALS (AMAT) LASED PEDESTAL P/N 0040-60593

APPLIED MATERIALS (AMAT) UV RELAY ASSY P/N 0010-A7810

MRL CORE, BLACK MAX FURNACE HEATER ELEMENT 4600819112

VARIAN ASSY, ES GAS DRY E11054660 11054660

APPLIED MATERIALS (AMAT) DSG BOARD ASSY P/N 0195-01051

AMAT CHAS PLASMA FLOOD (AR) DC DAQ 9090-01181ITL

TEL (TOKYO ELECTRON) MB3M87-041637-11 COLUMN TRAP -

APPLIED MATERIALS (AMAT) RTA PROBE ASSY P/N 0190-22676

APPLIED MATERIALS (AMAT) TEMP CONTROLLER P/N 0190-35798

AMAT DOOR POD OPENER 25 WAFER 0500-01087

DNS ELECT EEW UNIT, FULL ASSY SK2000 2-AE-J0184

NOVELLUS ASSY, LOADARM BOAT ROTATION ASM 2587998-01

KENSINGTON LAB NANO SPEC 9000i 7200-01084

AMAT HEATER, TIN 200MM 0010-18080

TEL (TOKYO ELECTRON) MB3S80-000332-11 DRIVE FEEDTHRU

APPLIED MATERIALS (AMAT) SHOWER HEAD P/N 0040-95444

AXCELIS NOVA WAFER HANDLER ASSY 8" CLASS 1 153-10000-04

APPLIED MATERIALS (AMAT) MEC2/L ASSEMBLY P/N 0090-A1671

BROOKS ASSY ROBOT ATR8 3FP NOVELLUS VCTR/WTSHV

SHIMADZU PUMP,TURBO TMP-2003LM-3

AMAT MOD ROBOT CONT GENCO 4 F 3680-A0141

APPLIED MATERIALS (AMAT) CATHODE LINER P/N 0041-05535

APPLIED MATERIALS (AMAT) IPU 2.5GHZ P/N 0090-A9920

AMAT WSI TARWSI2.7 5N 390/404MM X 8MMT FNQ-S41-000268A

APPLIED MATERIALS (AMAT) TARGET W SIP P/N 0190-17547

ADVANCED ENERGY PE-2500 GEN, RF1500W100KHZ 3157504-012C

DNS ASSY, SRHP LEFT SK2000 2-AE-J0261 1002AL SRHP

AMAT GEN, DUAL 13.56MHZ X 2MHZ, 1KW, 400VA 0190-23895

DNS ASSY, HP RIGHT SK2000 2-AE-J0132

VARIAN ASSY, I/V INTERFACE E11130350

ADVANCED ENERGY PINNACLE

APPLIED MATERIALS (AMAT) HTR ASSY WXZ P/N 0010-03331M

MRL CORE, BLACK MAX FURNACE HEATER ELEMENT 4600819112

APPLIED MATERIALS (AMAT) MULTIMETRIX SHUT 0190-08599

APPLIED MATERIALS (AMAT) TARGET, TI 20.625" 0190-07114

DNS ASSY, CP RIGHT SK2000 2-AE-J0121

BROOKS ROBOT, STANDARD ATM 4-1/2" (ACE) 6-0001-0513-SP

BROOKS AUTOMATION CONTROLLER PRE-ALIGNER 6-0002-0024-SP

ASTEX GMBH GENERATOR, OZONE SEMOZON 14-6008-00

ASTEX GMBH GENERATOR, MICROWAVE D137645

ENI GHW25 RF GENERATOR 2500W GHW25A-13DF3N0-001 GHW-25A

OPHIR POWER AMPLIFIER MODEL XRF373-001 -

AMAT PWR AMPLIFIER RF 20W 0500-A0181

APPLIED MATERIALS (AMAT) CDMI ASSEMBLY P/N 0090-A1901

APPLIED MATERIALS (AMAT) PAD CONDITIONER 0010-05106

APPLIED MATERIALS (AMAT) CATHODE LINER P/N 0040-79916

APPLIED MATERIALS (AMAT) CCB II ASSEMBLY P/N 0195-01348

APPLIED MATERIALS (AMAT) CCB II ASSEMBLY P/N 0195-00178

ADVANCED ENERGY PE-2500 GEN RF 1500W100KHZ 3157504-012C

TEL (TOKYO ELECTRON) MB3M10-101688-11 WAFER ROTATION

AEROTECH ES13693-1 THETA AXIS STAGE P/N ADR175-E13693D2

AMAT THETA AXIS STAGE 0190-A0001

LION PRECISION EN193 AUTOFOUCS KIT P/N 060473-2

AMAT AutoFocus KIT STING 0240-a6770

VARIAN CONTROLLER, FARADAY E11048882 REV A

PRI AUTOMATION/EQUIP DIV ROBOT ABM-405-1-S-CE-S293

AMAT LINER CHAMBER CT W/LEAK CHECK PORT, EHA 0040-83384

APPLIED MATERIALS (AMAT) GUN HEAD P/N 0010-C5840

AMAT PWRSP 60KW 208VAC ENI SLAVE(20KW) DNET 0190-07967

ZEBRA TECH SERVO, AMP DRAWER 86841-000 REV J

ADVANCED ENERGY MATCH, RF FIXED 3155054-003B

AMAT RF GEN, 13.56MHZ, 1.25KW 208VAC, DEVICE 0190-01183

ALPHASEM COGNEX FRAME GRABBER 8120 CVM9

AMAT CAP, EXHAUST, POINT OF USE REACTOR EPI 0040-85573

LASER, 15 MILLIWATTS RATED MELLES GRIOT 3227H-C-64

AMAT PWRSP 40KW 480VAC ENI SLAVE(20KW)DNET F 0190-08034

AIR LIQUIDE GAS CABINET CONTROLLER,COMPLETE GC AVP

AMAT IA-COMP Cage Assy 0090-A1230

DNS LAMPHOUSE, EEW 80B 2-39-83273, HAMAMATSU L6599-01

DNS HAMAMATSU LAMPHOUSE, EEW 80B L6599-01 2-39-83273

AMAT TUNER 1/4-GUIDE WL 2.45GHZ 3KW 3-STUB 3750-01147

DNS ASSY, HP RIGHT SK2000 2-AE-J0132

TEL HEATER, SD2 DRYER, TEL CS1B80-001293-11

DNS PLATE, HOT ADHESION (AH) 80B ASSY 2-XZ-13045

AMAT 0010-00735 5000:ETCH INT. ENDPOINT MAINPLATE

AMAT 0010-09929 5000 ETCH INT. END POINT MAINPLATE

AMAT 0010-10550 MODULE MFG VGA MAIN PLT ASSY PREC. 5000

APPLIED MATERIALS (AMAT) CMP OPTICAL HEAD 0010-A0213

DNS ACU, SPIN DEVELOP SK2000 2-39-67685

DNS CONTROLLER INDEX 1 SLAVE L-SHAPE SK2000 2-39-63344

VARIAN POWER SUPPLY, ANALY CORREC MAG E19009031

IMTEC TANK, HEATED S-A2002-NEPAH47 QTZ