SEW MDS60A0015-5A3-4-00

本系統(tǒng)設計含有10路A／D采樣電路，該A／D采樣電路用于采樣控制側母線電流電壓、控制側兩相電流（三相中只有兩相電流是獨立的）、功率側兩相電流電壓以及功率側母線電流電壓等。選擇其中所需的采樣通過同軸電纜分別與DS1104的8個ADC單元相連，主要包括：控制側電流檢測、功率側電流檢測、控制側電壓檢測、功率側電壓檢測。

另外，采用復雜可編程邏輯器件（CPLD）綜合處理故障信號。本系統(tǒng)設計含有16個保護信號輸入，經(jīng)過“相與”后產(chǎn)生一個FAULT信號輸入至DS1104控制器板的主處理器，主處理器產(chǎn)生硬件中斷信號，使程序在Matlab軟件中停止運行，同時，還輸出一個BRAKE信號在控制平臺硬件上直接關閉PWM信號，實現(xiàn)實驗平臺的雙重保護。這16個保護信號經(jīng)過處理后輸出14個低電平有效的顯示信號，使對應的LED發(fā)光報警。

該控制方案在一臺由三相感應電動機自行改制的1 500 rpm，900 W的小樣機全數(shù)字控制平臺上進行驗證，設計PI可調的實時仿真界面?？刂破飨到y(tǒng)周期為80μs，數(shù)字滯環(huán)的寬為0．5 A。

SEW MDS60A0015-5A3-4-00 

Daihen RMN-40A RF Dome Automatic Matching Unit 1110-010...

Comdel CX-5000 RF DC Power Supply FP3515RD Untested CX-...

PRI Wafer Transfer Station IFE-3301 Asyst Loadport SMIF...

LAM Research 4420 Main Frame Assembly 852-010030-001 wo...

LAM Research 4420 Reaction Chamber Installation 860-010...

Brooks Automation Genus 200mm 001-9010-13 Right Load Lo...

VAT 650246-PA52-AIW1 Pendulum Control & Isolation Valve...

Daihen RF Dome Match RMN-40A Rebuilt 1110-01068

Rudolph Technologies MetaPulse 200 Metrology Tool 200mm

Rudolph Technologies Metrology Tool MetaPulse 200X Cu

LAM Research LBPM AC Distribution Unit 1B02735G01 New

ASML MicroScan II Lamp Housing Module 859-0481-007 unte...

MRC Eclipse Star RMX Magnet Assy. 026146 working

Keyence LX2-12T Transmitter / LX2-12R Receiver and LX2-...

Ecosys Novapure S451D Scrubber Tank C3-0NN-B5-C2-D3

LAM Research RBM AC Distribution Unit 1B02737G01 New

TEL ACT 12 CPL Cool Plate 300mm 2985-470922-W1

Varian Process Chamber Liner Changer Kit new

Edwards Dry Vacuum Pump iQDP40 QMB250 working

ENI MKS DCG-200Z Optima DC Power Master 0190-28953

Shimadzu Vacuum Turbopump TMP-3403LMC working

ENI Spectrum 5kW RF Generator B-5002 working 0190-27361

Lam RF Generator Cart 852-014681-005-K untested

Lam Research RF Generator Cart 852-014681-005 untested

Lam 4420 Etcher Orbital Gas Panel Assy 853-024403-100

Therma-Wave Optiprobe OP2600B Used, AS-IS

Nor-Cal Intellisys TPV-800 Pendulum Valve 0190-25401

Neslab DIMAX DEI Water Cooler Chiller 622023991801

LAM 4420 Etcher PCB Rack 853-017305-002 Working

Ecosys Novapure Resin Tank C3-0YN-C6-K2-H2 new

Ecosys Novapure S447D Scrubber Tank C5-YY0-B5-D5-NN new

AMAT IECP Main AC Cabinet 0190-01661 untested

Takatori ATRM-2100 Delaminator Tape Remover Working

Edwards iXH610 Dry Vacuum Pump AC1102121100 as-is

ATMI Ecosys CDO 862 Abatement Scrubber System untested ...

TEL Fujikin Water Vapor Gen. Controller WVG-S2-Y-IB7 Ne...

TEL Fujikin Water Vapor Generator WVG-S2-Y-IB4 New

TEL Fujikin Water Vapor Generator WVG-S2-Y-IB7 New

ENI Spectrum B-5002 5kW RF Generator 0190-15320 Working

Nor-Cal Intellisys TPV-800 Pendulum Valve 0190-25400

Materials Research Eclipse Star Chamber Assy. A119124

MRC Eclipse Star Chamber Assy. A120946

CTI-Cryogenics On-Board 8 Cryopump 8116232G001 new 3620...