MEC- MR-MC111系統(tǒng)底板

MEC- MR-MC111系統(tǒng)底板

MEC- MR-MC111系統(tǒng)底板

一直以來(lái)，作為現(xiàn)代工業(yè)自動(dòng)化的三大技術(shù)支柱之一，PLC廣泛應(yīng)用于各種自動(dòng)化系統(tǒng)，在生產(chǎn)過(guò)程的自動(dòng)化控制方面發(fā)揮著巨大的作用。2015年11月4日，匯川技術(shù)在第17屆中國(guó)工業(yè)博覽會(huì)工業(yè)自動(dòng)化展（IAS 2015），重磅推出AM600系列中型PLC（以下簡(jiǎn)稱(chēng)AM600）。據(jù)了解，這是匯川技術(shù)聚焦工業(yè)自動(dòng)化應(yīng)用領(lǐng)域，憑借十余載工控設(shè)備沉淀，以更的功能和更簡(jiǎn)易的操作重新定義PLC。

新品技術(shù)發(fā)布現(xiàn)場(chǎng)，深圳市匯川技術(shù)股份有限公司總工程師周保廷對(duì)新品AM600進(jìn)行詳解。

1.jpg

（周保廷詳解AM600產(chǎn)品特性）

據(jù)介紹，M600是匯川技術(shù)基于CoDeSys+A8的軟硬件平臺(tái)自主研發(fā)的中型PLC。它專(zhuān)為工業(yè)自動(dòng)化應(yīng)用而生，好比一個(gè)堅(jiān)固可靠的工業(yè)大腦，具備一站式解決方案，包括強(qiáng)大的運(yùn)動(dòng)控制、大規(guī)模分布式IO控制、多層次網(wǎng)絡(luò)等方案，可同時(shí)承載工業(yè)自動(dòng)化與信息化的中心樞紐功能。

 2.jpg

（匯川技術(shù)AM600-IS620N追飛剪演示）

一站式解決方案

AM600一個(gè)主機(jī)就包括各種現(xiàn)場(chǎng)總線(xiàn)，包括EtherCAT、CANopen、Profibus-DP現(xiàn)場(chǎng)總線(xiàn)，支持?jǐn)?shù)萬(wàn)點(diǎn)分布式IO；具備RS485x2，可以與更多外設(shè)互聯(lián)；內(nèi)置高速I(mǎi)O，可在需要的場(chǎng)合實(shí)現(xiàn)對(duì)步進(jìn)電機(jī)驅(qū)動(dòng)器或伺服驅(qū)動(dòng)器的控制；此外，主機(jī)還可以直接掛多達(dá)16個(gè)擴(kuò)展模塊。

不僅如此，AM600還具備通用以太網(wǎng)功能，可作為調(diào)試端口，同時(shí)也可作為多機(jī)互聯(lián)或與服務(wù)器實(shí)現(xiàn)互聯(lián)。

強(qiáng)大的運(yùn)動(dòng)控制功能

AM600聚焦總線(xiàn)運(yùn)動(dòng)控制，支持電子凸輪/電子齒輪功能，同時(shí)亦可支持PLCopen主流應(yīng)用功能?；贓therCAT總線(xiàn)運(yùn)動(dòng)控制，AM600可連接32軸伺服，實(shí)軸與虛軸可同時(shí)組合控制，兩伺服從站長(zhǎng)可達(dá)100m距離，支持伺服與擴(kuò)展機(jī)架的同時(shí)擴(kuò)展。在支持電子凸輪/電子齒輪功能表現(xiàn)上，AM600亦有不俗的表現(xiàn)：16軸電子凸輪控制同步周期小于2ms；圖形凸輪編輯器可以實(shí)現(xiàn)對(duì)復(fù)雜運(yùn)動(dòng)控制軌跡的快速執(zhí)行，可以在運(yùn)行中實(shí)時(shí)動(dòng)態(tài)修正凸輪數(shù)據(jù)；每個(gè)凸輪表數(shù)據(jù)支持65535點(diǎn)；凸輪數(shù)據(jù)與IEC程序相結(jié)合控制編程。

多層次網(wǎng)絡(luò)解決方案

得益于AM600的各種總線(xiàn)及通信接口，一網(wǎng)打盡設(shè)備或者產(chǎn)線(xiàn)的各個(gè)層次，包括——信息層：利用以太網(wǎng)接口輕松連接至工廠(chǎng)制造執(zhí)行系統(tǒng)MES及企業(yè)資源計(jì)劃ERP系統(tǒng)。設(shè)備層：提供以太網(wǎng)ModbusTCP功能，可連接并動(dòng)態(tài)協(xié)調(diào)各設(shè)備動(dòng)作；提供CAN通信互連設(shè)備，支持CANlink3.0或CANopen協(xié)議?？刂茖樱禾峁〦therCAT實(shí)現(xiàn)多軸的運(yùn)動(dòng)控制以或大規(guī)模IO控制；提供Profibus-DP以及CAN通信現(xiàn)場(chǎng)總線(xiàn)，可以控制多臺(tái)驅(qū)動(dòng)器或IO。信息層與設(shè)備層、控制層無(wú)縫結(jié)合，真正實(shí)現(xiàn)“一個(gè)主機(jī)，覆蓋”。

簡(jiǎn)單易用

采用IEC61131-3編程語(yǔ)言體系，支持PLCOpen標(biāo)準(zhǔn)6種編程語(yǔ)言，并充分考慮了亞洲用戶(hù)的編程習(xí)慣；全可視化組態(tài)配置，支持多種總線(xiàn)組態(tài)及本地IO硬件組態(tài)；輔以現(xiàn)代工程管理軟件，可實(shí)現(xiàn)多人合作編程，即使面對(duì)復(fù)雜應(yīng)用也游刃有余。此外，模塊化和可拆卸端子臺(tái)設(shè)計(jì)，讓AM600的安裝及接線(xiàn)維護(hù)更方便；離線(xiàn)仿真、在線(xiàn)調(diào)試及在線(xiàn)修改功能以及CPU本體自帶數(shù)碼管設(shè)計(jì)，使得產(chǎn)品調(diào)試及診斷更輕松。

AM600適用于大規(guī)?？刂频墓S(chǎng)自動(dòng)化、產(chǎn)線(xiàn)自動(dòng)化、過(guò)程自動(dòng)化領(lǐng)域以及自動(dòng)化設(shè)備，為各種自動(dòng)化控制設(shè)備及系統(tǒng)提供廣泛、可靠的控制應(yīng)用。

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【主營(yíng)產(chǎn)品】

1：Invensys Foxboro（?？怂共_）：I/A Series系統(tǒng)，F(xiàn)BM（現(xiàn)場(chǎng)輸入/輸出模塊）順序控制、梯形邏輯控制、事故追憶處理、數(shù)模轉(zhuǎn)換、輸入/輸出信號(hào)處理、數(shù)據(jù)通信及處理等。

2：Invensys Triconex: 冗余容錯(cuò)控制系統(tǒng)、基于三重模件冗余（TMR）結(jié)構(gòu)的現(xiàn)代化的容錯(cuò)控制器。

3：Westinghouse（西屋）： OVATION系統(tǒng)、WDPF系統(tǒng)、WEStation系統(tǒng)備件。

4：Rockwell Allen-Bradley: Reliance瑞恩、SLC500/1747/1746、MicroLogix/1761/1763/1762/1766/1764、CompactLogix/1769/1768、Logix5000/1756/1789/1794/1760/1788、PLC-5/1771/1785等。

5：Schneider Modicon（施耐德莫迪康）：Quantum 140系列處理器、控制卡、電源模塊等。

6：ABB：工業(yè)機(jī)器人備件DSQC系列、Bailey INFI 90等。

7：Siemens(西門(mén)子)：Siemens MOORE， Siemens Simatic C1，Siemens數(shù)控系統(tǒng)等。

8：Motorola（摩托羅拉）：MVME 162、MVME 167、MVME1772、MVME177等系列。

9：XYCOM：I/O 、VME板和處理器等。

10：GE FANUC(GE發(fā)那科)：模塊、卡件、驅(qū)動(dòng)器等各類(lèi)備件。

11：Yaskawa（安川）：伺服控制器、伺服馬達(dá)、伺服驅(qū)動(dòng)器。

12：Bosch Rexroth（博世力士樂(lè)）：Indramat，I/O模塊,PLC控制器,驅(qū)動(dòng)模塊等。

13：Woodward（伍德沃德）：SPC閥位控制器、PEAK150數(shù)字控制器。

14:工業(yè)機(jī)器人系統(tǒng)備件。

Nissin NI89-0286-1, Keyboard H/C (English Version), 416873

AMAT 0020-31999 Chuck, Pedestal, Etch Chamber, 419625

AMAT 0020-31999 Chuck, Pedestal, Etch Chamber, 419626

AMAT 0020-31999 Chuck, Pedestal, Etch Chamber, 419627

STEC SEC-4550 MFC, Mass Flow Controller, N2, 30 SLM

STEC SEC-4550 MFC, Mass Flow Controller, N2, 30 SLM

STEC SEC-4550 MFC, Mass Flow Controller, N2, 40 SLM

STEC SEC-4550 MFC, mass flow controller, O2, 50 SLM, 324247

 PCB Scan driver bd for SEM 0001-00001 rev C

Danfoss 131L9869 VLT HVAC Basic Drive, 11kW, 15HP, 3x380-480V, 50/60Hz, 423666

Millipore MFC Tylan 2979M Series FC-2979MEP5, O2, 1 SLPM Looks very clean

Tylan MFC 2979 series FC-2979MEP5-L, C4F8, 50 SCCM, looks new

NEW Millipore MFC FSCGD100QE09, H2, 100 SCCM, With calibration sheet

Millipore MFC Tylan 2979 series, FC-2979MEP5-W, O2, 100 SCCM, looks very clean

Nor-cal Products 796-00809-1-001, High Vacuum Pneumatic Valve w/ Chamber, 422573

MKS CDN391R, AS01391-21-1-1, 506-024, FW:4.025, HW:2002, PCB. 322259

MKS CDN391R, AS01391-21-1-1, 506-024, FW:4.025, HW:2002, PCB. 322281

MKS CDN391R, AS01391-21-1-1, 506-024, FW:4.025, HW:2002, PCB. 322258

MKS CDN391R, AS01391-21-1-1, 506-024, FW:4.025, HW:2002, PCB. 322260

Varian 01907110-00D, Wafeform Gen III, SCH 01907113 D, PCB. 409815

Varian 01907110-00D, Wafeform Gen III, SCH 01907113 D, PCB. 322292

MKS CDN391R, AS01391-21-1, FW:4.025, HW:2002, Board, PCB. 322259

AMAT 0020-23079, Clamp Ring, 5", AL, SMRMF, Reduced Flat. 416195

AMAT 0020-10122 Plate, Perf, 125mm, Oxide 415187

AMAT 0020-85419, Electrode Focus, CARBOGTAF 500. 419158

AMAT 0020-91097 Issue. C, Flexible Machining Systems, Stress Ring. 417641

AMAT 0020-91097 Issue. C, Flexible Machining Systems, Stress Ring. 417642

AMAT 0020-91097 Issue. C, Flexible Machining Systems, Stress Ring. 417643

AMAT 0140-00644 Rev.001, Harness Assembly, D Cell A Digital Pneumatic. 417644

Coyote Point Equalizer E650GX Load Balancer 416372

Coyote Point Equalizer E650GX Load Balancer 416374

ABB QSB23175L, Circuit Breaker, 240V, 175A, 3 Pole 416375

Tektronix 577, Curve Trace w/ 177 Standard Test Fixture, D2 Storage. 416423

NEW SWAGELOK 6LVV-ALD6HFR4-P-CS-NV lots of 2

Semprex 17-2358.00 Motor Controller, 423534

2 TEL, Tokyo Electron SR00609, 8", Extension Ring, MIT w/ Data Sheet. 418401

AMAT 0030-90038 Casting Cam, 417805

AMAT 0020-75402 Rev.A, KLC 1702, Reducer, 2" FNPT x 1 1/4" MNPT FTG. 418307

AMAT 0010-04051 Hose Assembly Chamber Supply 200MM Preclean, 418650

AMAT 0010-04051, BAT, Hose Assembly Chamber Supply 200mm Preclean. 418705

AMAT 0200-09084 Shield, 125mm, Sputter Etch, 417389

AMAT 0140-04457, Harness Assembly, Pressure XDRC Control, 300mm R. 417574

AMAT 0140-04457, Harness Assembly, Pressure XDRC Control 300mm R. 417582

AMAT 0140-07090 Harness Assy, 300M Axiom, Bulkhead C Bias, 417624

AMAT 0100-40029 PCBA, Source Metrology BD

AMAT 0660-01894 INTL PC STPR BackPane Integra

AMAT 0040-33564 Release Shaft, Quick Change 2.1 Brush Mo

AMAT 0190-13922 External Encoder cable, version 2

Granville Phillips 274028 Ion Gauge Sensor, PVD, AMAT Conflat Seal, 419257

AMAT 0040-44407 Clamp, Bottom, NI Producer, Quartz, Blade, 420356

AMAT 0040-44407 Clamp, Bottom, NI Producer, Quartz, Blade, 420357

AMAT 0020-99382 Rev.A, Thomas Hatchard, Shaft, Drive 25-30, Durometer. 419310

AMAT 0020-09062 Gas Distribution Plate 416636

Millipore FC-2900M-4V MFC, Mass Flow Controller, O2, 100 SCCM, 422032

Unit Instruments UFC-1200A MFC, Mass Flow Controller, HCL, 50 SCCM, 405469

AMAT 0040-03590 Pan, Spill, 1.2L TDMAT, TXZ Gas Box 300, 417820

AMAT 0020-24633 Top Cover CH TRay B Outer (Widebody) 417900

AMAT 0020-24633 Top Cover CH TRay B Outer (Widebody) 417901

AMAT 0020-24633 Top Cover CH Tray B Outer (Widebody) 417902

AMAT 0021-04094, Support, Chamber, AFO, CH C/D, SEIKO S. 417917

Black Box ACS4201A-R2-MM DVI-D KVM Extender, 423780

AMAT 0020-14010, Shield End Effector. 417955

Motion Systems 73058-001, Motor W/ AMAT 0040-49302, 0020-22987, 24V. 416718

Melles Griot 040AS008, Microscope Objective Lens, 6.3x, Tencor 209074. 416813

Kollmorgen AKM24F-BSM22-02 Servomotor, 320VDC, 8000 RPM, 418162

Metron 233-4939-60 ACT 12-200 Catch Cup, 3 Pieces, 423638

IVS 0001-00060 Control module for SEM

AMAT 0021-23121 Rev.003, MEI-003-21302, Pin Tip PPR iECP. 419652

MKS Instruments 683B-26033, Isolation Gate Valve. 416972

MKS Instruments 683B-26033, Isolation Gate Valve. 416973

MKS Instruments 683B-26033, Isolation Gate Valve. 416974

MKS Instruments 683B-26033, Isolation Gate Valve. 416975

Asyst 3200-1065 Daughter Board, PCB, Asyst 3200-1015, FAB 3000-1065-01, 423315

LAM KG7-M4520-010 I/O Board Assy, Yamaha Motor KG7-4521-010, 422712

Keithley 2000 Mulimeter, 423565

Tescom 72-2461 KRN20, Regulator Valve Assembly, W/ Celerity GFF02A4BVM. 417048

Tescom 72-2461 KRN20, Regulator Valve Assembly, W/ Celerity GFF02A4BVM. 417049

Tescom 72-2461 KRN20, Regulator Valve Assembly, W/ Celerity GFF02A4BVM. 417050

Yaskawa CIMR-ZU4A0005FAA, VFD, Variable Frequency Driver, Z1000, Digital. 419697

Tescom 72-2461 KRN20, Regulator Valve Assembly, W/ Celerity GFF02A4BVM. 417007

AMAT 0190-02328 Waveguide, QTZ RPN Step Transition CH C, 0190-02328/001, 418181

AMAT 1350-00056 Baratron Pressure Transducer MKS 872B12PME2MR1, 100 PSIA, 418202

Brooks Automation 8112212G005 Cable Assy Adapter On-Board, 50', 423843

Brooks Automation 8112212G005 Cable Assy Adapter On-Board, 50', 423844

7 Centronics Interface PCB Board 068486-003

Micron 810-00347R KF40 Isolation Valve Staggered Port, 421560

Brewer Science 6KSD-9004C, Spinner Motor Card, PCB. 418252

THORLABS LDC 202 C LASER DIODE CONTROLLER 200mA, LDC 202C, 423585

NEW Berkeley Process Controls ASM81-A-0/L-00-LB/10 AC brushless servo motor

Unit Instruments URS-100-WE MFC, Controller, 117VAC, 50-60Hz, w/Key. 419877

Danfoss 131L9798 VLT HVAC Basic Drive, 5.5kW, 7.5HP, 3x200-240V, 50/60Hz, 423665

Digital Graphix Inc 068155-02 PCB Assy, 2166-1098, 07-0130-00, 58430212, 422377

MKS Instruments 100991861, HPS Division, Rapid Isolation Valve. 417149

MKS Instruments 100991861, HPS Division, Rapid Isolation Valve. 417150

MKS Instruments 100991861, HPS Division, Rapid Isolation Valve. 417151

MKS Instruments 100991861, HPS Division, Rapid Isolation Valve. 417152

MKS Instruments 100991861, HPS Division, Rapid Isolation Valve. 417153

AMAT 0190-14940 Flexible Water Line Hose, Supply Heat Exchanger, 423399

AMAT 0190-14940 Flexible Water Line Hose, Supply Heat Exchanger, 423400

AMAT 0190-14940 Flexible Water Line Hose, Supply Heat Exchanger, 423401

AMAT 0190-14940 Flexible Water Line Hose, Supply Heat Exchanger, 423402

MKS 627A-13267 Type 627 Baratron Pressure Transducer, 20 Torr, 422913

AMAT 0225-02349 Rev.XA, Pedestal Assembly, Bottom, 150. 418450

Cambridge Technology Dual 6650 Glavanometer Optical Scanner Assembly. 417205

MRC A115105, Eclipse Star Remote Control Box, KBD. 419961

AMAT 0020-07049 Support, Seal

AMAT 0040-75023 BEZEL, Monitor Cover, 420711

NEW Bodine 42R5BFPP-5N, Gear motor 120VDC 1/8 hp gearmotor

Arroyo Instruments 5305 TECSource Temperature Controller, 5A/12V, 423605

AMAT 0150-70038 Coaxial Cable, 420027

Nikon PCB KBA00101-AE36, R Stage SRV 12031-IC, CL5542. 418550

AMAT 0040-18113 Rev.B, Arm #2, MW Support, Ultima MDP-CVD. 418609

Asyst 4002-9005-01 Power Supply, V ADJ, 422585

Asyst 4002-9005-01 Power Supply, V ADJ, 422586

AMAT 0050-76094 Rev.A, 021, 1028, 17393201, Equalizaton Line. 418662

Power One HCBB-75W-A Power Supply, 420771

AMAT 0190-20096, TC Wafer, 8" MAC, SensArray 1501A-8-0139. 416026

AMAT 0020-10176 Rev.P1, Motorola MOS 21, Cover, Shadow Ring, Quartz. 417354

AMAT 0200-09557B, Ring, Focus, West Coast Quartz, POLY, 150mm/170. 417415

AMAT 0020-31147 Insert, Base, Alum, ISO, 200mm, Etch Chamber Cathode, 417425

AMAT 0020-31147 Insert, Base, Alum, ISO, 200mm, Etch Chamber Cathode, 417426

AA2-12 Cable, 8 Conductor, 16 AWG, AAZ-12, 422628

Equipe 2002-2137, Pre300 Video PCB, FAB 2008-2090, Wafer Prealigner. 420141

Oriental Motor Vexta KBLD120-A, AC Servo Driver, 50/60Hz, 7.5A. 416337

UNIT 1660 UFC-1660 He 10 SLPM with calabration sheet

AMAT Slit Valve Door Insert Buffer Transfer Chamber PVD Centura Endura, 416344

Pfeiffer TPS 100 Turbo Pump Power Supply Controller, PM 041 828-T, 420181

Keithley 2000 Multimeter, 423723

AMAT 0200-20061 Insulator, Quartz, 6", PVD Sputter chamber PCII, , 417506

AMAT 0021-15387 Bracket Foreline Support, Producer, 417509

ABB ACS355-03U-24A4-2 IP20/UL Open Type Low Voltage Machine Drive, 423730

AMAT 0020-10771 Perf Plate, 150mm, OX, Showerhead 417528

Nikon KBA00101-AE36, Reticle Stage SRV, PCB, 12031-IC. 419205

Pacific scientific N31HRHK-LNK-001 Stepper Motor

2 MKS MASS FLOW CONTROLLER 5877, He, 10 SCCM

UNIT MFC Mass Flow Controller UFC-8165, 10L, Gas N2

STEC MFC Mass Flow Controller SEC-4400MC-UC, NH3, 5 SLM

UNIT UFC - 7000 industrial MFC Mass Flow Controller, H2, 1.00 SLM

BOC EDWARDS interface module, U20000521 

Watlow Winona Syst-5071-0000 Temperature Monitor, 420921

Watlow Winona Syst-5071-0000 Temperature Monitor, 420922

3 AMAT 0020-26721 Mount, Ball Transfer, FI Outrigger, 3690-00526, 329445

AMAT 0010-60024, SUSC. 6", BSE BWCVD, Susceptor, Plate, 150mm, Back Aram. 417636

Unit Instruments UFC-1200A, Mass Flow Controller, MFC, AR, 1 SLM. 417637

KLA Tencor 52-0282 Motor Filter Wheel, UV 1250, 419243

KLOEHN SYRINGE PUMPS MOTORIZED INJECTOR VALVES 19311

AMAT 0140-02419 Rev.001, Harness Assembly, Pressure XDUCER, CVD, 300mm. 417691

Pacific Scientific N31HRHK-LNK-NS-001 Stepper Motor

Vat Isolation Valve, DN 100, 90 Degree Angle

AMAT 0020-99422 Issue.A, Insert, Inner, Carbograf 500. 417898

AMAT 0020-99422 Insert, Inner, 417867

AMAT 0090-00980 Rev.001, Outer Element Heater ECP Anneal 300mm, 134. 418361

AMAT 0090-00980 Rev.001, Outer Element Heater ECP Anneal 300mm, 192. 418362

AMAT 0090-00980 Rev.001, 134, Outer Element Heater ECP ANNEAL 300mm. 418444

AMAT 0020-30600, Plate Gas Dist EGEC. 417565

AMAT 0140-03011 Harness Assy, Anneal Chamber, ECP SF3, 417799

AMAT 0140-03011 Harness Assy, Anneal Chamber, ECP SF3, 417800

AMAT 0140-03011 Harness Assy, Anneal Chamber, ECP SF3, 417907

AMAT 0140-03011 Harness Assy, Anneal Chamber, ECP SF3, 417908

4 new E17043060 spool lip seal wafer lift

4 NEW AMAT 0190-05336 Belt Assembly, Buffer / Trans

Bodine Electric 32X5BEPM-W2 Gearmotor, 130V DC, 1.0 A, 1/8 HP, 456 RPM, 423832

Bodine Electric 32X5BEPM-W2 Gearmotor, 130V DC, 1.0 A, 1/8 HP, 456 RPM, 423833

New Varian Cold Cathode vacuum gauge w/ nw25 port

Lot of 12 Clamp Assembly Disc 233471447

2 Novellus Speedfam IPEC 810-738370 Vexta PK564ANA-TG30, Stepper Motors

Danfoss 131L9869 VLT HVAC Basic Drive, 11kW, 15HP, 3x380-480V, 50/60Hz, 423679

2 BOC Edwards APG-M-NW25 ST/ST Active Pirani Gauge, 422592

2 BOC Edwards APG-M-NW25 ST/ST Active Pirani Gauge, 422593

AMAT 7300-027077 Chuck, AN AL, 300mm, 422673

3 AMAT 0040-45933 Ball Transfer Screw Assy, 324366

6 AMAT 0020-14125 GASKET, SILICONE, RUBBER LAMP MODULE

Yaskawa CIMR-F7U27P5 Varsispeed F7 AC Drive, 423768

2 TCR 20S30 source magnet power supply electronic measurements

BODINE ELECTRIC 42A3FEPM-E4 GEARMOTOR, 130 VOLTS, CLEAN

MILLIPORE FC-2902MEP-T, SIH4, 1.5 SLPM

AMAT 0190-70066 Fantray 300CFM 19" X1.75" X 8" 115 VAC, REPL, 417819

MKS 124A-11848 Baratron Pressure Transducer, Type 124, 2000 Torr, 422768

MKS 124A-11848 Baratron Pressure Transducer, Type 124, 2000 Torr, 422769

AMAT 0040-45546 Rev.001, Hood, Toxic Skin Upper Front, 300mm RADI. 417858

AMAT 0021-37701 Side Receiver, Left 200mm, 316-EP, 417986

AMAT 0021-21504 Shield, Heater, 8" Enhanced Orienter Degas, 417987

NEW PCB Robot Motion control amplifier Western servo design 10087-100 AVB

AMAT 0020-24727 Pedestal Shield 5" Preclean II, 418296

AMAT 0040-22933 Rev.001, Base, 300mm, PVD Chamber, GASBOX. 418324

Keyence N-400 Multi-Drop Controller Assy w/ 2 N-48 Communication Units. 423412

AMAT 0020-18715 Insert Chamber Slit Valve, 423975

MKS 124-11848 Baratron Pressure Transducer, Type 124, 2000 Torr, 422986

MKS 124-11848 Baratron Pressure Transducer, Type 124, 2000 Torr, 422987

Contemporary Controls MODHUB-16F, 4-Port Modular Network Hub, ARCNET. 420051

AMAT 0200-09347, Collar SI, 0X/M2R/NIT, 150mm FLAT, 5200. 416859

AMAT 0021-36625 Cover, Side Lower Chamber, DPS, 417388

ILX Lightwave MPS-8033 Precision Fiber Optic Source, 850 nm FP, 416307

AMAT 0020-30086 Plate Perforated, 150mm, Nitride, Giant Gap, 415299

MKS 99E0716 Vacuum Interlock Assy w/ Safety Valve, 750C11TCD2GG Baratron, 423493

AMAT 0200-10246 Uni-Insert, GDP, Liner, 88 Hold, Quartz, 417558

AMAT 0090-77349 Assy TRM MTR Rotary SHTL PM 1/2, MCG-ME3776, 7.50 LB-IN 416369

AMAT 0090-77349 Assy TRM MTR Rotary SHTL PM 1/2, MCG-ME3776, 7.50 LB-IN 416370

Ebara C-3812-324-0021 Edge Ring E, TEL, Tokyo Electron SR00908, 420251

AMAT 0021-20571 Shield, Lower 8" 101, 11.3, SST, Aluminum, 401193

AMAT 0020-18452 Rev.A, Strip 2, Side Coil, Match Box, HDPCVD, Rev3. 418085

Olympus MDPlan 150, 0.95, IC 150, 

3 AMAT 0150-09616 SPAN IPS 122 Type 1, 8-30VDC, 12W Cable Pressure Switch 418436

AMAT 0200-00014, Cover, Quartz, 100mm, XTAL. 417350

AMAT 0225-32985, XYCarb Ceramics 590423A, Gas Ring, Quartz, 12 Holes. 417353

AMAT 0225-32985, Gas Ring, Quartz, 12 Holes, 417443

AMAT 0030-90039 Casting Bracket Lock, 417749

AMAT 0100-00156 Isolation Amplifier PCB, FAB 0110-00156, 416454

AMAT 0100-00046 AC Current Sense, PCB, FAB 0100-00046, 416456

AMAT 0020-77370 Pulley

GAST, Oiless Vacuum Diaphragm, 965513, D800

AMAT 0020-25631, Cover, POS, A/B, MEI-120. 416678

AMAT 0090-00021 Rev.E, Motor Assembly, 262:1, Vented 12V. 419402

AMAT 0090-00021 Rev.E, Motor Assembly, 262:1, Vented 12V. 419403

AMAT 0090-00021 Rev.E, Motor Assembly, 262:1, Vented 12V. 419404

AMAT 0090-00021 Rev.E, Motor Assembly, 262:1 Vented 12V. 419409

AMAT 0020-09077 Rev.B, 5600 PAR 50/00, Support, Arm, 200mm. 419414

AMAT 0020-09077 Rev.B, 5600 PAR 50/00, Support, Arm, 200mm. 419415

AMAT 0020-09077 Rev.B, 5600 PAR 50/00, Support, Arm, 200mm. 419416

Z axis ball screw with stepper motor 500054082

AMAT 0021-06926 Holder, Liner, XZ Anneal, 417990

Tamagawa Seiki AU3501N8 Turbo Pump Controller, 423298

Tamagawa Seiki AU3501N8 Turbo Pump Controller, 423299

Advanced Energy AE-4855015 RF Cable, AE, 423657

Ampro F12035002 PCB, OPC 1298MD, Circuit Board, STPCE1HEBC, 422714

AMAT 0200-09474 Disc, Ring, 150mm, Quartz, 422864

AMAT 0140-03870 H/A, AC Power, PDO Tray 3-Station, 24 VDC, 5.8 FT, 418139

AMAT 0040-76149 P5000 MKII-XT Weldment, Foreline CH B HE, 418145

6 Centronics Interface PCB Board 068486-003

BOC Edwards A55001192 Pump Silencer TMS Control Unit, 330w, 50/60 Hz, 421559

Summit Contactor 8-32S9K/ST2ATC Cover Set, 1906484-101, 423854

Novellus 15-10676-00, Blank off Mesa Flange, Chamber Spacer , Insert. 418247

AMAT 0040-76149 Rev.A, P5000 MKII-XT Weldment, Foreline Chamber B HE. 418249

AMAT 0200-14015 Sheath Quartz Radiometer, 418239

AMAT 0040-76149 P5000 MKII-XT Weldment, Foreline Channel B HE, 418297

Ham-Let H-700-SS-L-1"-T-LD Manual Lever Valve Assembly, Griswold Controls 420661

Danfoss 131L9867 VLT HVAC Basic Drive, 5.5kW, 7.5HP, 3x380-480V, 50/60Hz, 423680

Disco FBPCB-0022, Text Graphic Board, PCB, PWB-A223-B, BP-MTG-001. 418414

Novellus 02-117299-00 Assy, Probe, Keyed, Chemic, 3, 6, 23, ATMI, 321343

Novellus 02-117299-00 Assy, Probe, Keyed, Chemic, 3, 6, 23, ATMI, 321345

Novellus 02-117299-00 Assy, Probe, Keyed, Chemic, 3, 6, 23, ATMI, 407883

2 AMAT 0050-03937 Rev.P, Water Supply Weldment, Piping Cham A. 417180

AMAT 0020-09029 Covering Pipe, 419900

AMAT 0020-09029 Covering Pipe, 419901

AMAT 1360-00045, XFMR Control 50VA 208/240/277/380/480P. 401331

AMAT 0020-04194 Rev.A, Top Lid, MXP, 0020-09517 Heating Element. 419908

Pfeiffer Balzers TCP 121 Turbo Pump Controller, 422562

11 new AMAT 0030-00196 face seal 200mm

6 Swagelok 6LVV-DPBW4-P-C Valve Manifold, 422565

Hoke 7387004R, Valve 100 PSIG, 316 SST/ EPDM. 418440

Varian 113940001 Arc Chamber Base Plate, 418477

AMAT 0020-04194, Top Lid, MXP, 0190-09162 Heating Element, Chamber. 420048

AMAT 0200-09602, Pipe, Insulating, Quartz w/ Flange, Tube MXP. 420059

Unit Instruments UFC-3165 MFC Mass Flow Controller, N2, 100L, 3030-03330, 423453

Unit Instruments UFC-3165 MFC Mass Flow Controller, N2, 100L, 0190-08914, 423454

AMAT 0100-14006 w/ PCB Operator Interface Assy, 417302

AERA FC-PA7800C-BA MFC, Mass Flow Controller, AR, 5 SLM, 423695

AERA FC-PA7810C-BA MFC, Mass Flow Controller N2, 10 SLM, AMAT 3030-16228, 423697

Opto 22 AC37 High-Speed Communication Adapter Card, PCB, 422591

MKS MFVA23C026AAA Mass Flow Verifier, 423480

AERA FC-PA7810C-BA MFC, Mass Flow Controller AR, 20 SLM, 423705

AERA FC-PA7800C-BA MFC, Mass Flow Controller AR, 5 SLM, 423706

ULVAC PST-030AU Sputter ION PUMP, 420784

ULVAC PST-030AU Sputter ION PUMP, 420785

AMAT 0021-07321 Bracket, BPSG Assembly, XE CH A, RTP, CM, 417356

AMAT 0200-00047D, West Coast Quartz, Clamp Ring, 150mm, 1/4 TK OXIDE/MLR. 417429

Comdel CPM-5000 Match Pro Remote Controller, CPM-5000/REMOTE, 423043

Leybold CT 200 ECE Turbo Pump Controller 416323

Leybold CT 200 ECE Turbo Pump Controller 416324

Leybold CT 200 ECE Turbo Pump Controller 416325

Parker Digiplan PDS 13-2/USA , PDS Series 13, 97101400163, 300VA. 416335

AMAT 0021-38456 Cover, Lining, 420180

Varian 113940001, 1902, Arc Cham Base Plate. 419112

APTech AP3000S 2PW TW4 TW4 1.75 Valve Assembly, w/ AP3625NS, 420223

Bay Advanced Technologies 9268-01, 40 Station Valve Assy. 416352

AMAT 0200-14015 Sheath, Quartz, Radiometer, 417500

ABB ACS355-03U-24A4-2 IP20/UL Open Type Low Voltage Machine Drive, 423731

Aera FC-PA7810C-BA MFC, Mass Flow Controller, Si2H6, 2 SLM, 3030-16242, 423739

Aera FC-PA7810C-BA MFC, Mass Flow Controller, NH3, 8 SLM, 3030-16230, 423741

AMAT 0100-90697 Rev.A, PWBA 9210 Wafer Arm Replaces 0100-9063 242138-SP. 417608

Mitsubishi FR-F740PJ-3.7K Inverter, 423753

AMAT 1150-01037, Probe Electrode ION Selective AG/S Solid, 27502-41, KK9. 417723

AMAT 1150-01037, Probe Electrode ION Selective AG/S Solid, 27502-41, KK9. 417725

AMAT 1150-01037, Probe Electrode ION Selective AG/S Solid, 27502-41, KK9. 417722

Matchlett ML-6257 High Voltage Power Vacuum Tube, Raytheon, 422966

AMAT 0190-08850 Specification Assy, Cable, Ext, Polarize MT, Nanometrics, 417767

AMAT 0020-04267 Rev.P8, Base DCR Controller, PAR 30/94. 417853

AMAT 0050-76080 Line, Exhaust Channel C&D Lower 316L SST, 418389

AMAT 0050-76080 Rev.A, Line, Exhaust Chamber. C&D Lower 3. 418427

AMAT 0140-05437, Wire Set DC Power Supply, Cable, Assembly. 416227

AMAT 0100-90190, PWBA M/B Filament Power Supply. 417580

AMAT 0100-90190-H, CN2-01-17, ZZGAD, 108H, PWBA M/B Filament PWR Supply. 417581

AMAT 0100-90190, WH 14 B, 4608083-0001, PWBA M/B HLAMENT Power Supply. 417595

AMAT 0190-08850 Specification Assy, Cable, EXT, Polarize MT, 417658

Yaskawa SGDA-01AS, Servopack Servo Drive, Amplifier, AMAT 0870-01010. 416952

Yaskawa SGDA-01AS, Servopack Servo Drive, Amplifier, AMAT 0870-01010. 416958

Yaskawa SGDA-01AS, Servopack Servo Drive, Amplifier, AMAT 0870-01010. 416959

Yaskawa SGDA-01AS, Servopack Servo Drive, Amplifier, AMAT 0870-01010. 416960

Yaskawa SGDA-01AS, Servopack Servo Drive, Amplifier, AMAT 0870-01010. 416961

Yaskawa SGDA-01AS, Servopack Servo Drive, Amplifier, AMAT 0870-01010. 416964

Swagelok NXT-DRP41AFDFD-0 2-Way, Flare 3/8," AMAT 3870-04958, 420577

OMEGA LCGD-1k Load cell 0-1000lb, sealed box

AMAT 0040-44376 Rev.001, Panel, Photohelic 300mm. 419726

2 Mitsubishi MR-J2S-20B Servo Motor 417009

4 AMAT 0021-06582 Stop, Hard, Lift, Rot Head-ECP, 421604

Mattson 2411931, AWP Piranha, Cover PVDF Complete. 417125

Mattson 2411931, AWP Piranha, Cover PVDF Complete. 417126

VERIFLO CORP GAS VALVE 45200254

Vexta PK54ANA-TG3- 5 phase stepper motor, .024" step, Oriental motors

APPLIED MATERIALS 3870-01584 VALVE AIR ACTUATEO DIAPH

Yaskawa SGDA-01AS Servopack Servo Drive, Amplifier, AMAT 0870-01010, 423919

Nano Metric XLS75, 7200-02208 Rev.B , UV Light Source. 418537

AMAT 3870-04958, Swagelok NXT-DRP41AFDFD-0, 2-Way Valve, Flare 3/8". 418675

2 AMAT 0020-76429 Side Plate Upper Frame Rear Centura, 422598

6 AMAT 3320-90034 gasket graphite

Millipore CDLD-21S06E Manometer, 0-100 Torr, Novellus 60-054373-00, 423479

Advanced Energy 3155043-001A RFX 2 System Remote Controller 416326

Advanced Energy 3155043-001A RFX 2 System Remote Controller 416327

Disco EAUA--334701, FAPCB-0412, Driver Board. 419181

Novellus 27-127854-00, COSEL UAW500S-24, Power supply, 24 V, 22A , NIB

New AMAT 0040-05531 Cover, CHM I/O Drawer Top

Nova 964948 Display Mount

AMAT 0040-46720 Guard, Spoolpiece, Left, TICL4 Producer, 417751

4 Varian 102934001 Aperture, 2nd, Graphite, 102934001-5, 420206

Novellus 22-055667-00 DN100 4" Mechanism, VAT 94842-R1, Gate Valve, 420995

Novellus 22-055667-00 DN100 4" Mechanism, VAT 94842-R1, Gate Valve, 420996

Novellus 22-055667-00 DN100 4" Mechanism, VAT 94842-R1, Gate Valve, 420997

AMAT 0020-21095 Issue.A, Shielding Disc (Buncher Elect). 419322

AMAT 0020-30407 Perf Plate, 200mm, BW, Showerhead, 422734

ASYST 4003-3011-01 SERVO MOTOR, REV A, DELTRAN PT, BRP-19AL, 24 VDC

ASYST 4003-3011-01 SERVO MOTOR, REV A, 24 VDC

AMAT 1270-00224 SW Flow Non-Adjustable 100CC/M Increasing, 417904

AMAT 0020-05053 Perf Plate Performance+, 100-150mm, 417882

AMAT 0040-62929, SWLL B FI Panel Intermediate TETRA. 417925

AMAT 0140-04642 Rev.001, Harness Assembly, ACDC Drawer, DC 300mm RTP C. 417929

Cutler-Hammer JD3250F Series C Circuit Breaker, AMAT 0680-01142. 419540

AMAT 0040-96525 Init.B, FXD Clip Silicon Sprayed 200 - 0. 417950

SMC VV5Q11-ULB990070 16 Station Pneumatic Manifold Assy, NP420-DN1, 423500

cybor power supply 512F

APTech AP1410S 4PW MV4 FV4 0 0 ST SP Regulator Valve, 4-Way, 423549

Varian 810-320687-1, Top Cover, TEL. 419684

Varian 810-320687-1, Top Cover, TEL. 419685

Varian 70278001, Moisture Detector 416985

Edwards AIM-S-NW25 Active Gauge, Turbo Molecular Pump Vacuum, 420574

STEC LF-310A-EVD, TEB 0.1 g/min Liquid Flow Controller

STEC LF-310A-EVD, TEPO 0.25 g/min Liquid Flow Controller

STEC LF-310A-EVD, TEB 0.5 g/min Liquid Flow Controller

Aera MFC FC-7800CU, O2, 2 SLM

Aera MFC, Mass FLow Controller, FC-7810CU, C2F6, 2 SLM 

Pittman 9236E466 Asyst Loader Motor, 24 VDC, 500 CPR, 418141

Agilent 9699950L0500 V70-V150HT- V250- V300HT 500 CM Extension Cable, 423845

Agilent 9699950L0500 V70-V150HT- V250- V300HT 500 CM Extension Cable, 423848

Nor-Cal Manual ESV-202-NWB NW50 KF50 Isolation Valve, 422430

Superior Electric M063-LE-507E Slo-Syn Stepping Motor, 2.9A, 3.36VDC. 418238

Superior Electric M063-LE-507E Slo-Syn Stepping Motor, 2.9A, 3.36VDC. 418239

Superior Electric M063-LE-507E Slo-Syn Stepping Motor, 2.9A, 3.36VDC. 418240

Warner Electric M06.3-LE-507E Slo-Sync Stepping Motor 2.9A, 3.36VDC. 418241

Warner Electric M06.3-LE-507E Slo-Sync Stepping Motor 2.9A, 3.36VDC. 418242

ABB AF185-30-11 Circuit Breaker 100-250V 50/60HZ / 100-250V DC, 422433

ABB AF185-30-11 Circuit Breaker 100-250V 50/60HZ / 100-250V DC, 422531

THORLABS LDC 201 C ULN LASER DIODE CONTROLLER 100mA, LDC 201C, 423586

AMAT 0190-15735 Rev.P1, 9281-03 Rev.A, Harness Assembly DNET Gas Panel 1. 418267

 PCB Scan Focus Board for SEM 0003-00596 rev c

Silicon Thermal PS500 Power Supply, LB 300-1 Controller, T Type TC. 418336

Matsushita AFC12342-F NAIS Micro Controller Board, PCB, FP-M-C32T, C32T. 423397

Matsushita AFC12342-F NAIS Micro Controller Board, PCB, FP-M-C32T, C32T. 423398

Matsushita AFC12342-F NAIS Micro Controller Board, PCB, FP-M-C32T, C32T. 423396

APTech AP1210SM 2PW FV8 MV8 FC Single Stage Regulator Valve, Isolation, 422873

Keyence N-400 Multi-Drop Controller Assy w/ 2 N-48 Communication Units. 423411

Danfoss 131L9866 VLT HVAC Basic Drive 4.0kW, 5.5 HP, 3x380-480V, 50/60Hz, 423681

Vacuum General AC-2 AdapTorr Vacuum Controller, 422242

AMAT 0021-11628 Cover, EMO Panel 300mm SM4, 419936

AMAT 0021-11628 Cover, EMO Panel 300mm SM4, 419938

Metrowerks CWCODDETEST4MIC Codetest Data Collection Unit, 419939

TEL, Tokyo Electron, 1208-001151-11, Indexer PCB. 419963

TEL, Tokyo Electron, 1208-001151-11, Indexer PCB. 419964

Yokogawa Compumotor SD1004B64 Dynaserv Servo Drive, Parker, 422927

AMAT 0200-00059 Cover, QTZ DF, 417247

AMAT 0035-00069, Base, RF Filter Box, 300mm DPS II, 0035-00068. 419944

AMAT 0021-13247 No.3, Arm, Right Extended Reach 300mm. 418429

MKS HPS 152-0025K Pneumatic Vacuum Isolation Valve, Angle, 423450

MKS HPS 152-0025K Pneumatic Vacuum Isolation Valve, Angle, 423451

MKS HPS 152-0025K Pneumatic Vacuum Isolation Valve, Angle, 423452

AMAT 0100-00177 Rev.E, EP Module I/O Interconnect. 418510

AMAT 0100-90243, PWBA RS232 I'FACE UNCONF CAN I/O. 418560

AMAT 0040-34742 Rev.001, Bracket for Manostar Gauge. 418561

AMAT 0100-90243, PWBA RS232 I'FACE UNCONF CAN. 418520

AMAT 0100-90243, PWBA RS232 I'FACE UNCONF CAN. 418527

AMAT 0100-90243, PWBA RS232 I'FACE UNCONF CAN. 418575

Berkeley Process Controls MWTX-8-MNET, 2.1.1 Machineworks Controller, 422270

Berkeley Process Controls MWTX-8-MNET, 2.1.1 Machineworks Controller, 422272

MKS 1259C-00010SV MFC Assy, Mass Flow Controller, N2, 10 SCCM, 423470

AMAT 0200-00059 Rev.001, Cover, Quartz, 6, DF. 417380

TEL, Tokyo Electron, 581-1AE1-006 Sensor Transducer, 911 Magnetrol Level, 423617

TEL, Tokyo Electron, 581-1AE1-006 Sensor Transducer, 911 Magnetrol Level, 423618

AMAT 0200-00042 Rev.A, West Coast Quartz, Cover, Quartz, Poly, 100mm. 417419

AMAT 0200-00042 Rev.A, West Coast Quartz, Cover, Quartz, Poly, 100mm. 417422

AMAT 0200-00042 Rev.A, West Coast Quartz, Cover, Quartz, Poly, 100mm. 417423

Novellus 22-055667-00 DN100 4" Mechanism VAT 94842-R1, Gate Valve Insert, 422629

EFFEKTA EFF.1500 I-NET 19"-STE UPS, Uninterruptible Power Supply, 416309